Advanced Energy Unveils Centra Smart Hub for Improved Temperature Measurement in Next-Generation Semiconductor Tools
Advanced Energy (AEIS) launched the Centra Smart Hub at SEMICON West, a device for precise, non-contact temperature measurement in semiconductor tools. Combined with its Remote Smart Sensors, it offers up to 40% accuracy improvement over standard solutions, supporting processes like rapid thermal annealing and epitaxial growth. The hub integrates with leading system architectures and aims to enhance wafer-to-wafer repeatability and thermal uniformity, improving yields.

